Fiji / ImageJ

Open-source scientific image analysis platform for SEM, TEM, AFM and microscopy image measurement.

Details

Fiji is a scientific image analysis distribution of ImageJ bundling many plugins, suited to microscopy image processing, particle counting, defect measurement, morphology analysis and batch image processing. In semiconductor research it can be used for quantitative analysis of SEM, TEM, AFM, optical microscopy and wafer defect images.

Use cases: SEM images, TEM images, AFM images, defect detection, particle counting, microscopy image analysis

Note: Complex automated defect recognition can be extended with Python, OpenCV or machine learning methods.